Grant: AIR PRODUCTS AND CHEMICALS, INC.
AIR PRODUCTS AND CHEMICALS, INC.
CDFA Program Title
Renewable Energy Research and Development
The project will develop an RF plasma-enhanced CVD (RF-PECVD) process for the deoposition of a-Si and nc-Si films and solar cells at growth rates of 2 nm/sec or greater. This will be accomplished by incorporating mixtures of silane with higher order sila
Recipients Connected to Award
|UNIVERSITY OF DELAWARE||Sub-recipient||$1,145,789.00|
|AIR PRODUCTS AND CHEMICALS, INC.||Primary recipient||$323,735.00|
|UNIVERSITY OF TOLEDO, THE||Sub-recipient||$78,000.00|
|PENNSYLVANIA STATE UNIVERSITY, THE||Sub-recipient||$28,835.00|