Primary Recipient

INPRIA CORPORATION

Amount

$100,000.00

Award Date

6/08/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

This SBIR Phase I project will assess the technical feasibility of developing a robust, high-speed inorganic electron-beam resist platform that will revolutionize the manufacture of electronic devices with feature sizes < 30 nm. The rest of the abstract