Primary Recipient

REGENTS OF THE UNIVERSITY OF MICHIGAN

Amount

$1,700,000.00

Award Date

8/24/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

The objective of this project is to acquire an electron-beam lithography system for the University of Michigan. This system will be used to facilitate research on a broad array of new technology, materials, structures, and devices, including nanolithogra