Primary Recipient

UNIVERSITY OF HOUSTON SYSTEM

Amount

$175,000.00

Award Date

7/19/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

Chemically-amplified resists are required for high-throughput patterning of integrated circuits, but recent experimental and theoretical reports suggest that these systems cannot simultaneously achieve the required resolution, sensitivity, and line edge r