Grant: IOWA STATE UNIVERSITY
Primary Recipient
IOWA STATE UNIVERSITY
Amount
$700,000.00
Award Date
8/26/2009
Administering Agency
CDFA Number
47.082
CDFA Program Title
Trans-NSF Recovery Act Reasearch Support
Description
Description of the Instrument: The project is for the acquisition of a Raith e-line electron beam lithography system, which is capable of defining feature sizes < 20 nm over large areas (4G?x4G?). The instrument is also capable of doing stitchless li
Vendors Connected to Award
| Vendor | Role | Amount |
|---|---|---|
| RAITH USA INC | Primary vendor | $0.00 |
| RAITH USA INC | Primary vendor | $0.00 |
| RAITH USA INC | Primary vendor | $0.00 |
| RAITH USA INC | Primary vendor | $0.00 |