Grant: MASSACHUSETTS, UNIVERSITY OF
Primary Recipient
MASSACHUSETTS, UNIVERSITY OF
Amount
$507,980.00
Award Date
7/31/2009
Administering Agency
CDFA Number
47.082
CDFA Program Title
Trans-NSF Recovery Act Reasearch Support
Description
The objective of this project is to utilize an innovative nanoimprint lithography (NIL) technique for research and training in prototyping and fabrication of micro/nano sensors/actuators, nano devices, nanostructures and nanoscale tooling for nanomanufact