Primary Recipient

IOWA STATE UNIVERSITY OF SCIENCE AND TECHNOLOGY

Amount

$476,449.00

Award Date

6/12/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

Development of appropriate manufacturing processes is critical to realizing integrated circuits (IC) with multilevel metallization designs. Over the past 20 years, through significant improvements in design and manufacturing, the Chemical Mechanical Plana