Primary Recipient

LUMARRAY INC.

Amount

$468,979.00

Award Date

8/06/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

This SBIR Phase II project is a major step in the development of an optical-maskless-lithography technology that is capable of high resolution, high throughput, flexibility, low cost and extendibility. Current lithography technologies suffer from the pro