Primary Recipient

UNIVERSITY OF CONNECTICUT

Amount

$259,059.00

Award Date

6/16/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

The PI is planning an experimental research program to investigate the growth of epitaxial crystalline oxide layers on semiconductor substrates by atomic layer deposition. Crystalline oxides are an important class of materials that exhibit a rich variety