Primary Recipient

IONWERKS, INC.

Amount

$99,949.00

Award Date

6/01/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

This Small Business Innovation Research Phase I project is to develop a secondary electron detector which can be co-axially mounted with a micro-focused ion beam. Backscattered neutral atoms (and ions) and secondary electrons will be analyzed to give a me