Primary Recipient

TEXAS ENGINEERING EXPERIMENT STATION

Amount

$252,097.00

Award Date

7/30/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

'The objective of this research is to develop a waveguide radio-frequency micro-electromechanical systems tunable filter as a unique three-dimensional microstructure in silicon. The approach is based on combining 1) bulk micromachining for miniaturized ca