Grant: S C SOLUTIONS INC
Primary Recipient
S C SOLUTIONS INC
Amount
$476,695.00
Award Date
8/06/2009
Administering Agency
CDFA Number
47.082
CDFA Program Title
Trans-NSF Recovery Act Reasearch Support
Description
'SBIR Phase II: Model-Based Control for Chemical-Mechanical Planarization of Copper/low-k Films.'