Primary Recipient

COLORADO STATE UNIVERSITY

Amount

$329,786.00

Award Date

6/29/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

The objective of this research is to demonstrate a new table top photolithography scheme capable to print sub-50 nm features. The approach is based on projection holographic lithography, consisting of printing photoresist with the reconstructed image of a

Recipients Connected to Award

Recipient	Role	Amount
COLORADO STATE UNIVERSITY	Primary recipient	$191,351.00
TRUSTEES OF BOSTON UNIVERSITY	Sub-recipient	$138,435.00