Primary Recipient

KURT J. LESKER COMPANY

Amount

$500,000.00

Award Date

7/31/2009

Administering Agency

National Science Foundation

CDFA Number

47.082

CDFA Program Title

Trans-NSF Recovery Act Reasearch Support

Description

At successful completion of the project KJLC intends to introduce a turn key, sputter deposition tool, for low temperature TCOG??s. A key component of the tool will be a fully integrated deposition process. The sales price of these tools will range betwee