Grant: DUKE UNIVERSITY
Primary Recipient
DUKE UNIVERSITY
Amount
$450,000.00
Award Date
3/08/2010
Administering Agency
CDFA Number
47.082
CDFA Program Title
Trans-NSF Recovery Act Reasearch Support
Description
This proposal presents a plan to acquire a silicon deep reactive ion etching (DRIE) system to be installed and operated within the Shared Materials Instrumentation Facility (SMIF) at Duke University. The proposed system represents industry-leading DRIE pr
Vendors Connected to Award
| Vendor | Role | Amount |
|---|---|---|
| SPP Process Technology (Foreign Entity, NP182TA00) | Primary vendor | $184,500.00 |
| SPP Process Technology (Foreign Entity, NP182TA00) | Primary vendor | $430,500.00 |