Primary Recipient

FEI COMPANY

Amount

$4,514,933.00

Award Date

8/31/2010

Administering Agency

Commerce, Department of / National Institute of Standards and Technology

CDFA Number

CDFA Program Title

Description

Two (2) Dual Beam (DB) system, one High Resolution Scanning Electron (SEM) and one High Resolution Focused -ion-beam (FIB). (Helios NL650) built and installed.