Primary Recipient

HEIDELBERG INSTRUMENTS INC

Amount

$1,328,500.00

Award Date

9/30/2010

Administering Agency

Commerce, Department of / National Institute of Standards and Technology

CDFA Number

CDFA Program Title

Description

This award has been issued for a DWL 2000 Laser Lithography System with a Robotic Auto-Loader. This system is capable of patterning approved photo-materials at micron and sub-micron scales. The system will be installed at the customer site.