Primary Recipient

KINETIC SYSTEMS, INC.

Amount

$88,895.00

Award Date

9/23/2010

Administering Agency

Commerce, Department of / National Institute of Standards and Technology

CDFA Number

CDFA Program Title

Description

Kinetic Systems, Inc. is providing a pneumatic vibration isolation system for an optical stepper. First stage is to design a system that can be installed in an existing clean room. The system needs to be in multiple segments to satisfy the size and load